Thin film deposition by Physical Vapor Deposition or PVD is an established technique for a diverse selection of applications such as multi-layer x-ray optics, coatings of aerospace, automotive and machine tool components, depositing solar materials or thin films in digital, semi-conductor and medical device manufacturing. The Atoms Atomic Optical Tracking System from Acculturate utilizes Atomic Absorption Spectroscopy or AAS and Atomic absorption spectroscopies to address the need for in-situ, real time monitoring of the deposition process to guarantee movie quality and yield. In PVD, metals, alloys, Compound semiconductors or other materials are vaporized, resulting in a cloud of atoms, which can be precisely deposited on a substrate to make a thin film. The coating can be as thin as a few Angstroms. AAS is a real time optical metrology method to track this process as it occurs.
To achieve this unique Capacity, a probe beam of light in a wavelength, unique to the component it has to track is passed through the plasma. Particular hollow cathode light sources are used that uniquely match the wavelength to the element under study. The vaporized atoms absorb the probe light proportionally to their nuclear concentration. By tracking this absorption, Atoms provides a special system of process monitoring. Software is used to compute the atomic concentration of the individual elements of interest and contrasts the film deposition rate, depth and chemical composition. HCL light sources can be Selected to track over 60 components and some HCLs can emit lines to track 2 components, and with two such lamps 4 components can be measured simultaneously. This provides for tracking the chemical composition of the developing film in real time. Additionally, the unique, fiber optic-based system supports multi-sensor capabilities for mapping of the whole area of the substrate to control uniformity.
In many programs, atomic absorption spectroscopy has Proven to be the best option in comparison to more traditional monitoring methods. It may be applied to non-transparent movies such as metals and alloys, extremely thin films and intricate multi-layers, in addition to films deposited on curved or transferring substrates. Acculturate, Inc. is a Provider of custom and higher performance optical metrology tools which may be used to substantially enhance product yield and product functionality. The organization’s platform technology is based on deploying an assortment of fiber-optics-based spectroscopic techniques together with deep learning, process modelling and predictive process management. Accusant’s products include fiber optics sensors, hardware modules and proprietary applications for real time spectroscopic monitoring. This information addresses detailed mechanisms, metrology and performance specifications for the Atoms — Atomic Absorption/Atomic absorption spectroscopy system. Figure 1 shows the outside view of this Atoms hardware module. The system and methods described in this document is protected under a pending patent.